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Database Needs for Modeling and Simulation of Plasma Processing
Database Needs for Modeling and Simulation of Plasma Processing
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Book Details

In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation.
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  • Authors National Research Council, Division On Engineering And Physical Sciences, Panel On Database Needs In Plasma Processing
  • ISBN13 9780309055918
  • ISBN10 0309055911
  • Pages 74
  • Published 1996
  • Fecha de publicación 21/10/1996
  • Language German, French
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Database Needs for Modeling and Simulation of Plasma Processing
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Database Needs for Modeling and Simulation of Plasma Processing (German, French)

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