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Ion-Solid Interactions: Fundamentals and Applications
Ion-Solid Interactions: Fundamentals and Applications

Book Details

This book describes how materials, from semiconductors to tool steels, can be modified to create new materials. Its importance is that it is the first book in two decades to describe completely the implantation process which is used universally in semiconductor production.
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  • Authors Michael (Los Alamos National Laboratory) Nastasi, James (Arizona State University) Mayer, James K. Hirvonen
  • ISBN13 9780521373760
  • ISBN10 052137376X
  • Pages 572
  • Published 1996
  • Fecha de publicación 29/03/1996
  • Language German, French
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Ion-Solid Interactions: Fundamentals and Applications

Ion-Solid Interactions: Fundamentals and Applications (German, French)

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